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- Kato, Ryuichi, et al. Show all 4 Authors
- Carbon 2016 v.96 pp. 1008-1013
- activation energy; graphene; industrial applications; radio waves; vapors
- ... High throughput synthesis of atomic layer graphene membrane by chemical vapor deposition (CVD) is one of key technologies to establish industrial applications. Here we report the details of the initial stage of graphene growth on copper substrate by radio frequency (RF) plasma-assisted CVD under low pressure and compare the nucleation rate and the growth rate with conventional thermal CVD. Two-dim ...