Jump to Main Content
- Schmid, Günter, et al. Show all 3 Authors
- Chemical communications 2003 no.12 pp. 1333-1335
- aluminum oxide; chemical reactions; nanopores; polymethylmethacrylate; silicon
- ... Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE). ...