Author: "Mascher, P." / Journal: Journal of materials science / Publication Year: 2018 / Subject: annealing and chemical bonding / Text Availability: Citation in PubAg

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Author:: Mascher, P., et al. ; Khatami, Z.; Nowikow, C.; Wojcik, J.; Show all 4 Authors
Source:: Journal of materials science 2018 v.53 no.2 pp. 1497-1513
ISSN:: 0022-2461
Subject:: Fourier transform infrared spectroscopy; X-ray diffraction; X-ray photoelectron spectroscopy; annealing; chemical bonding; coatings; desorption; hydrogen; photovoltaic cells; quantitative analysis; refractive index; silicon; silicon carbide; temperature; transmission electron microscopy; vapors
Abstract:: ... Silicon carbonitride (SiCₓNy) materials, inspired by their outstanding multifunctional properties, are finding increasing applications in a variety of fields, including as next generation solar cells and hard coatings. Hydrogenated SiCₓNy thin films, along with binary submatrices of stoichiometric SiC and SiN₃ as a reference, were deposited using electron cyclotron resonance plasma-enhanced chemic ...
DOI:: 10.1007/s10853-017-1576-6
: http://dx.doi.org/10.1007/s10853-017-1576-6