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You searched for: Author "Mascher, P." Remove constraint Author: "Mascher, P." Publication Year 2018 Remove constraint Publication Year: 2018 Subject annealing Remove constraint Subject: annealing Subject chemical bonding Remove constraint Subject: chemical bonding Subject Fourier transform infrared spectroscopy Remove constraint Subject: Fourier transform infrared spectroscopy Text Availability Citation in PubAg Remove constraint Text Availability: Citation in PubAg
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1. Annealing of silicon carbonitride nanostructured thin films: interdependency of hydrogen content, optical, and structural properties

Author:
Mascher, P.,   et al.   ; Khatami, Z.; Nowikow, C.; Wojcik, J.;     Show all 4 Authors
Source:
Journal of materials science 2018 v.53 no.2 pp. 1497-1513
ISSN:
0022-2461
Subject:
Fourier transform infrared spectroscopy; X-ray diffraction; X-ray photoelectron spectroscopy; annealing; chemical bonding; coatings; desorption; hydrogen; photovoltaic cells; quantitative analysis; refractive index; silicon; silicon carbide; temperature; transmission electron microscopy; vapors
Abstract:
... Silicon carbonitride (SiCₓNy) materials, inspired by their outstanding multifunctional properties, are finding increasing applications in a variety of fields, including as next generation solar cells and hard coatings. Hydrogenated SiCₓNy thin films, along with binary submatrices of stoichiometric SiC and SiN₃ as a reference, were deposited using electron cyclotron resonance plasma-enhanced chemic ...
DOI:
10.1007/s10853-017-1576-6