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- Z. Khatami; C. Nowikow; J. Wojcik; P. Mascher
- Journal of materials science 2018 v.53 no.2 pp. 1497-1513
- Fourier transform infrared spectroscopy; X-ray diffraction; X-ray photoelectron spectroscopy; annealing; chemical bonding; coatings; desorption; hydrogen; photovoltaic cells; quantitative analysis; refractive index; silicon; silicon carbide; temperature; transmission electron microscopy; vapors
- ... Silicon carbonitride (SiCₓNy) materials, inspired by their outstanding multifunctional properties, are finding increasing applications in a variety of fields, including as next generation solar cells and hard coatings. Hydrogenated SiCₓNy thin films, along with binary submatrices of stoichiometric SiC and SiN₃ as a reference, were deposited using electron cyclotron resonance plasma-enhanced chemic ...