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Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy

Author:
Cavalaglio, S., Robert, L., Gauthier-Manuel, B.
Source:
Journal of membrane science 2011 v.383 no.1-2 pp. 250-253
ISSN:
0376-7388
Subject:
Fourier transform infrared spectroscopy, artificial membranes, potassium hydroxide, silicon
Abstract:
We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed.
Agid:
1018856