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Ceramic Thin Films on Plastics: A Versatile Transfer Process for Large Area as Well as Patterned Coating

Author:
Kozuka, Hiromitsu, Fukui, Takafumi, Takahashi, Mitsuru, Uchiyama, Hiroaki, Tsuboi, Shohei
Source:
ACS Applied Materials & Interfaces 2012 v.4 no.12 pp. 6415-6420
ISSN:
1944-8252
Subject:
ceramics, coatings, gels, melting, plastics, silicon
Abstract:
A versatile technique for fabricating ceramic thin films on plastics has been proposed. The technique comprises (i) the deposition of a gel film by spin- or dip-coating on a silicon substrate coated beforehand with a release layer, (ii) the firing of the gel film into a ceramic film, and (iii) its transfer onto plastics by melting or softening the plastics surface. Reflective anatase and electrically conductive indium–tin-oxide (ITO) thin films were prepared on acrylic resin and polycarbonate substrates. Patterned ITO thin films could also be fabricated on plastics by using a mother silicon substrate with periodic grooves.
Agid:
5273665